Home > Bronkhorst unveils a new series of vapour delivery modules

Bronkhorst unveils a new series of vapour delivery modules

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article image VDM series vapour delivery module

Anri Instruments & Controls announces the release of a new series of vapour delivery modules designed by Bronkhorst High-Tech BV, a leading manufacturer of mass flow meters and controllers for gases and liquids.

These compact sub-systems incorporate a thermal or Coriolis liquid flow controller, one or two mass flow controllers for carrier gas and a temperature controlled mixing and evaporation device.

Equipped with a 1.8” TFT display and push-buttons for local readout and control, Bronkhorst’s VDM series vapour delivery modules are operated via digital communication (RS232 or FLOW-BUS). The vaporisers can optionally be supplied with an additional mass flow controller for dilution as well as local or remote trace heating temperature control.

The compact, ‘plug and work’ modules can generate saturated vapour flows within the range of 100sccm up to 10SLM. The applied Controlled Evaporation Mixing (CEM) technology is suited for atmospheric or vacuum processes and is capable of evaporating mixtures and even solids, dissolved in solvents.

Ideally suited for vapour deposition and coating processes for the production of semiconductor chips, displays and solar cells, VDM series vapour delivery modules can also be used for the calibration of analytical devices such as gas chromatographs and mass spectrometers for anaesthetic delivery and humidification of fuel cells.

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