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Long-travel piezo scanning system

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article image Integrated capacitive feedback.

PHYSIK Instrumente (PI) has unveiled a long-travel piezo scanning and nanomanipulation system, available exclusively through Warsash Scientific .

It offers integrated capacitive feedback and closed-loop control that boost linearity by up to three orders of magnitude over conventional stages.

The P-563.3CD PIMars provides 300 x 300 x 300µm travel in the X-Y-Z axes, with nanometer resolution.

It has a 66-mm2 clear aperture and a parallel kinematics design that features only one moving part. Response is in the millisecond range.

Available versions include ultra-high-vacuum, invar, superinvar and titanium.

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