PHYSIK Instrumente, represented by Warsash Scientific , has released its P-620 HERA stages, nanopositioning systems which combine travel ranges up to 500μm with high precision motion in a very compact package.
Applications such as optical path adjustment for (dynamic) interferometry, or sample positioning for microscopy (quality assurance or biotechnology) require long travel ranges in combination with positioning accuracy in the nanometer range.
The long travel range of the HERA stages is achieved with a newly designed, friction-free and extremely stiff flexure system which also offers high guiding accuracy and rapid settling.
The closed-loop versions are equipped with high-resolution capacitive position sensors which can provide contact-free measurement and higher linearity, resolution, repeatability and bandwidth than other sensors.
They show none of the periodical errors found in incremental linear encoders, and permit motion linearity of 0.01% and resolution in the sub-nanometer range.
HERA nanopositioning stages use special flexure designs which give them excellent guidance properties: pitch and yaw are typically less than 5 μrad (0.00029º) over the full travel range.