RECENTLY introduced by SMC Pneumatics , the series SF clean gas filters are particularly suitable for ensuring the quality of gases used in semiconductor manufacture, thin film deposition, vacuum metallurgy, biomedical and pharmaceutical production and research laboratories.
Component parts for the Series SF are cleaned, assembled, inspected and tested in Class 100 clean room conditions.
The main filter bodies are manufactured from electro-polished stainless steel and cleaned using ultrasonics and superpure water. The finished product is double packaged to maintain product integrity prior to use.
All Series SF filters are available with a choice of three port connections: female taper threaded; tube swage joint and union O-ring joint.
The degree of filtration is 100% of all particles of 0.01 micron or larger with the exception of the SFB200 gas strainer.
The SFB200 features a replaceable sintered 316 stainless steel element capable of removing 120-micron particles with 95 per cent efficiency. This filter is primarily designed for protection of regulators and solenoid valves in a clean-room environment.
All filters are designed to accommodate gas flow rates up to 80Nl/min at inlet pressures to 700kPa and pressure drops to 10kPa. Installation is claimed to prevent contamination of downstream processes and gas-driven equipment, increasing component life and minimising risk of product reject or process failure.
The new filters feature PTFE membrane elements that have been leak tested down to 4x10-7atm.cm3/s. The membranes provide reliable operation in vacuum down to 10-5 Torr and pressures up to 1.5MPa. Filtration areas range from 10cm3 to 300cm3.
Series SFA filters are of in-line disk-type design in three body sizes and are ideally suited to use in clean gas blowing, pressurisation of clean liquids, air measuring systems, electrostatic spraying and painting and general filtration of compressed air, oxygen, hydrogen, freon, argon, helium, nitrous oxide and carbon dioxide.
Series SFA and SFB100 and SFB200 each have a maximum working pressure of 1.0MPa and maximum inlet temperature of 80°C. SFB300 has a maximum working pressure of 15MPa and a maximum inlet temperature of 120°C. Model SFC100 will accommodate a maximum inlet pressure of 1.8MPa and working temperature of 120°C.
Series SFB share product features with Series SFA but are described as replaceable cartridge type design providing a compact solution where space is restricted and smaller flows are acceptable.
Series SFC are disposable filters for gases used in semiconductor and related processes. Such gases may be considered dangerous and are commonly used in applications involving epitaxy, ion implantation and chemical vapour deposition.