Now distributed by Renishaw Oceania , RLD10-X3-SI differential interferometers are suitable for use with laser encoders, and have been designed to mount to the external wall of a process chamber via a simple three-pin mount.
The design of this mounting system allows the detector head to be removed and repositioned with minimal effect on system alignment.
In addition, integral beam steerers allow for independent pitch and yaw adjustment of reference and measurement beams, ensuring that there is no need to enter the chamber to align the detector head.
These differential interferometers are often used with RLE20 laser encoders, also supplied by Renishaw Oceania. This combination provides a high resolution laser system that is well suited to measurements in vacuum chambers and other strictly controlled environments.
Laser encoders that incorporate RLD10 differential interferometers benefit from a range of high precision features, including:
- ppb frequency stability and ultra low cyclic error, allowing output resolutions to 38.6 pm
- differential configuration; and
- rapid alignment.