TUILASER, represented by Lastek , has developed an improved version of the high power ExciStar S-Industrial laser. The ExciStar S-Industrial is a heavy-duty model based on TuiLaser's family of ExciStar S mini excimer lasers.
The new highly efficient model facilitates SEMI certification because of the following new features:
* Solid state switch according to CE.
* Enables the certification of final customer product for system integrator according to SEMI/FDA/UL-CSA/CE.
* Third party certification for all power supplies and safety relevant components according to IEC 61010.
* SEMI compliant housing interlock switch.
* SEMI level documentation.
* Seismic mounts prerequisite for use in semi environment.
* High safety level because of fewer but higher integrated modules separated from each other.
* New gas management system.
Different versions are available that vary in repetition rate (200, 500 or 1000Hz) and wavelength (157, 193, 248, 308 or 351nm).
The advanced model, the ExciStar S Industrial, is designed for heavy duty cycle industrial applications such as optics testing, mask writing, wafer inspection,and micro lithography, etc.