New vacuum, flow and leak detection solutions guide from John Morris Scientific (13-Oct-2008)
John Morris Scientific have introduced their theory and product guide to vacuum, leak detection, flow and pressure measurement solutions.
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John Morris Scientific
61-63 Victoria Ave
Chatswood NSW 2067
Tel: 1800 251 799
Fax: +612 9417 8855
Supplier´s Website
Enquire now
Incorrect details?
61-63 Victoria Ave
Chatswood NSW 2067
Tel: 1800 251 799
Fax: +612 9417 8855
Supplier´s WebsiteEnquire now
Incorrect details?
Pressure insensitive mass flow controller from John Morris Scientific
MFC pressure insensitive mass flow controller
John Morris Scientific has introduced MKS’s new pressure insensitive mass flow controller, the MFC.
The MFC offers process reliability and device flexibility for all gas delivery applications.
The MFC includes improvements in functionality and performance to help users in semiconductor and high purity thin film applications increase tool throughput and reduce overall system costs.
Real-time accurate flow control that is insensitive to upstream and downstream pressure disturbances is provided through advanced digital algorithms.
By enabling real-time control of process gas flow, accuracy and repeatability is significantly improved over conventional PID based digital MFC’s resulting in better chamber matching.
The MFC is cost effective for users through several innovative enhancements. To reduce the amount of MFC’s in inventory, users are able to access specific MFC gas calibrations and flow ranges from up to 31 stored gas tables, configuring the MFC straight off the shelf.
The MFC is easy to use, the gas selection and full-scale range can be easily selected by the user via the included web browser.
12-Jun-2008Contact John Morris Scientific
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John Morris Scientific have introduced their theory and product guide to vacuum, leak detection, flow and pressure measurement solutions.
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