Heraeus Amba Australia , a company within the worldwide precious metal and technology organisation Heraeus Holding GmbH, is making the semiconductor industry aware of the advantages of tailor-made special emitters, which are precisely tailored to the manufacturing process.
The water-cooled infrared high power emitter, an important further development for high-tech heating processes delivers short wave radiation in the near infrared region (NIR) at filament temperatures of up to 3200°K and offers a power output of up to 1.2 Megawatt/m².
The emitter is best suited to high temperature processes and, because of its rapid heat-up rate, temperatures of over 1000°C can be achieved at the product within seconds.
Consequently, heating times are radically shortened. The water-cooling of the emitters eliminates the need for air-cooling, which significantly reduces the noise level during manufacture.
The high power emitters were originally developed for RTP (rapid thermal processing) operations in the semiconductor industry but, fundamentally, they can be used for all finishing operations which require fast heating or cooling.
Excimer UV technology from Heraeus makes available 172nm- and 222nm-UV emitters, with the high photon density currently achievable, for rapid processes and processes requiring short irradiation times.
These emitters, the Excimer emitters, which are the powerful on the market, are suited to surface cleaning in wafer- and LCD technology, for the activation or modification of surfaces and for CVD technology.
By using high power irradiation systems with only one UV emitter, operating costs are significantly reduced. High power Hg-amalgam emitters from Heraeus are also good for cleaning process and for the production of ultra-pure water.
Heraeus Amba Australia offers the complete range from UV to IR and provides advice in the selection of the optimum emitter for specific applications.