Covering 110 nm to 350 nm, the spectral range of the UV lamps ensures a high UV intensity between 120 nm and 160 nm.
Vacuum UV lamps can be use in a range of applications including, but not limited to:
- cleaning of silicon wafer surfaces
- high resolution optics (e.g. quality assurance)
- photo-chemical processes with high photon energy
- semiconductor exposure
A cooling jacket is provided with D200 vacuum UV lamps and specially designed power supplies are also available.