Kalrez UltraPure O ring seals from Fluid Seals are well suited to wafer manufacturing, providing strong chemical resistance and temperature properties.
In addition, Kalrez UltraPure O ring seals have been designed specifically for semiconductor applications, offering low contamination in reactive plasmas and cleaning gases.
This improves vacuum sealing performance and lowers outgassing.
UltraPure O ring seals are manufactured under clean-cell conditions, and double packaged after being specially cleaned at Class 100 workstations.
Kalrez provides long term reliable performance in plasma, gas deposition, thermal and wet processing applications such as:
- etching and ashing
- lamp annealing
- wet etching and cleaning
- photoresist stripping; and
- copper plating.