Home > Fluid Seals offers low contamination Kalrez O ring seals for semiconductor applications

Fluid Seals offers low contamination Kalrez O ring seals for semiconductor applications

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article image Kalrez UltraPure O ring seals

Kalrez UltraPure O ring seals from Fluid Seals are well suited to wafer manufacturing, providing strong chemical resistance and temperature properties.

In addition, Kalrez UltraPure O ring seals have been designed specifically for semiconductor applications, offering low contamination in reactive plasmas and cleaning gases.

This improves vacuum sealing performance and lowers outgassing.

UltraPure O ring seals are manufactured under clean-cell conditions, and double packaged after being specially cleaned at Class 100 workstations.

Kalrez provides long term reliable performance in plasma, gas deposition, thermal and wet processing applications such as:

  • etching and ashing
  • HDPCVD
  • PECVD
  • diffusion
  • LPCVD
  • RTP
  • lamp annealing
  • wet etching and cleaning
  • photoresist stripping; and
  • copper plating.
Specifically designed for the semiconductor industry, Kalrez UltraPure parts are available in standard AS568 O ring sizes, as well as metric and JIS O ring sizes.

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