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ECD announces fluoride monitoring system for semiconductor fab wastewater treatment

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article image ECD’s fluoride monitoring system combines a dual-channel T80 universal transmitter and precision S80 Intelligent pION sensor

Electro-Chemical Devices (ECD) introduces a new fluoride monitoring system designed to assist electronics manufacturing engineers and plant technicians with fluoride measurement applications.

ECD’s next generation fluoride monitoring system provides a highly accurate turnkey analyser solution for semiconductor wastewater treatment processes. Designed with a new advanced dual-channel T80 universal transmitter and precision S80 Intelligent pION sensor for fluoride and S80 Intelligent pH sensor, the new solution provides highly accurate and reliable measurement of fluoride for electronics industry manufacturing plant wastewater treatment.

The T80 transmitter provides dual-channel comparison of measurements or inputs, which can improve the accuracy of fluoride measurement. For example, fluoride ions are affected by changes in the pH of a solution. The correct measurement of fluoride levels is only possible if pH is also measured and appropriate compensation algorithms are processed. The S80 pH sensor and the dual-channel T80 transmitter easily handle these measurement comparisons.

The efficient use of fluoride is an important part of the semiconductor industry’s fabrication process. Effective etching of semiconductor wafers is dependent on fluoride usage. Such processes produce wastewater and effluent contaminated with fluoride, which must be accurately analysed for effective treatment.

ECD’s S80 pION sensor for fluoride’s specific (pIon) electrode cartridge measures the activity of free fluoride ions in solution in concentrations from 0.02 to 2,000 ppm over a pH range of 5-8. They operate over a wide temperature range of 0-80°C.

The S80 immersion or insertion sensor is designed with a 0.75-inch MNPT compression fitting as the process connection and allows a variable insertion length to accommodate installation in pipe tees, flow cells or through tank walls. The S80 retractable sensor is designed with a 1-inch MNPT ball valve, a 1-x-0.75 inch reducer and a 0.75 inch MNPT compression fitting to provide the process connection.

In addition to fluoride measurement, ECD’s replaceable electrode cartridges for the S80 pION sensor for fluoride can also measure parameters such as specific ions, pH, ORP, dissolved oxygen, conductivity and resistivity. These cartridges provide specific industrial process measurement solutions, and are constructed in a variety of configurations and materials to support diverse industries.

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