German National Metrology Institute have confirmed reference values for the Carl Zeiss F25 3D micro-coordinate measuring machine for position, size and form measurements. The F25 3D coordinate measuring machine is suitable for quality inspection in the micro-system technology and contact measurement in the range under 0.1 micrometers.
The F25 3D coordinate measuring machine, suitable for the inspection of micro-parts, measures accurately. The German National Metrology Institute (PTB) examined the performance of the F25 3D coordinate measuring machine for measurements on micro-parts with internal and external geometries and for form measurements. Tests with high exact standards showed agreement with the reference values. The values were better for form measurements.
The straightness deviations determined on a Zerodur gage block bridge were less than 100 nanometers. With a measuring length of 43 millimeters, they measured approximately 50 nanometers in the horizontal direction (x-direction) for unfiltered and 30 nanometers for filtered profiles. In the vertical direction (z-direction) about 40 nanometers were measured for unfiltered and less than 10 nanometers for filtered profiles with a measuring length of 1.75 millimeters. The reproducibility of the y-guideway deviations of the F25 3D coordinate measuring machine for the straightness profiles measured on the opposite surfaces of the gage block bridge was documented. This allows correction of the guideway deviations to within a few nanometers. The deviations of the z-guideway totalled a few nanometers. Therefore, the deviations of the guideway and standard can no longer be separated.
The performance of the F25 3D coordinate measuring machine was tested on suitable PTB standards. Reference spheres with a minimum diameter of 0.8 millimeters, a reference ring of 1 millimeter diameter and a Zerodur gage block bridge were used. The dimensional deviations were below 100 nanometers, and the straightness deviations were lower.