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Digital mass flow controller

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article image Bronkhorst High-Tech mass flow meter.

ANRI Instruments has announced the Bronkhorst High-Tech B.V.'s EL-Flow series - a range of compact, modular mass flow meters.

They can be combined with control valves, either integrated or separate, in order to measure and control gas flows in ranges starting from 0.06-3 mln/min up to 25-1250 ln/min air-equivalent.

Bronkhorst High-Tech developed its latest digital mass flow meters/controllers according to the "multi-bus" principle.

The basic PC-board on the instrument contains all of the general functions needed for measurement and control, including alarm, totalising and diagnostic functions.

It has analog I/O-signals and also an RS232 connection as a standard feature. In addition to this there is the possibility of integrating an interface board with DeviceNet, Profibus-DP or FLOW-BUS protocol.

The last mentioned is a fieldbus specifically designed by Bronkhorst High-Tech for mass flow metering and control solutions.

Applications can be found in semiconductor machinery and other process control systems, for instance food, chemical and petrochemical plants.

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