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Aerotech releases new piezo nanopositioners

Editorial
article image XY piezo nanopositioning stages provide high resonant frequency and stiffness for high throughput in demanding applications

Aerotech has introduced a new series of XY piezo nanopositioners featuring frictionless flexure guidance for extreme precision applications.

Aerotech’s new QNP-XY stages provide the highest resonant frequency and stiffness of positioners with comparable size and travel, allowing users to achieve higher throughput in exacting processes. Featuring resolution to 0.15 nm, linearity to 0.007% and repeatability to 2 nm, the stages meet the most demanding requirements of applications from microscopy to optics alignment. The QNP piezo stages are offered in travel ranges from 100 µm to 600 µm.

QNP piezo stages are guided by frictionless precision flexures that are optimised using finite element analysis for fast closed-loop response. The integrated XY package minimises stack height and moving mass, resulting in superior static and dynamic multi-axis performance.

When coupled with Aerotech’s Q-series controllers and drives, the stages demonstrate sub-nanometer positioning resolution and in-position stability, and high-positioning bandwidth. They are available with or without capacitance sensor feedback and a wide range of software options.

Aerotech’s new QNP-XY nanopositioning stages find application in test and inspection, industrial and academic laboratories, nanometrology, microscopy, semiconductors, microelectronics, optics, photonics, data storage, precision mechanics, metals, life sciences, and medical devices.

Aerotech is a leading global supplier of positioning and motion control products for industry, government, science and research institutions.

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